Semiconductor Photo Gallery
Bond Pad Metal Lifting
Figure 1.
Lifted ball bond due to bond pad metal delamination (left) and the bond
pad metal delamination itself (right)
Figure
1 shows SEM photos of a lifted ball bond (left) and the bond pad from
which it lifted off (right). This ball bond lifting occurred
because the bond pad metal delaminated from its underlying barrier metal
layer. A portion of the delaminated bond pad metal was torn off but
remained attached to the ball bond, as seen in the left photo.
Thus, in this
case, the adhesion of the ball bond to the bond pad surface metal is
good, which is why it was never detached from the bond pad metal even if
it was subjected to a stress that's large enough to tear a portion of
the bond pad away from the die. The problem in this case is the
poor adhesion of the bond pad metal to its underlying barrier metal.
See Also:
Wirebonding;
Bonding Failures
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