EESemi.com Forum Archives
Causes of
Lifted Ball Bonds
Bond lifting is a common problem in the
wirebonding process of semiconductor
manufacturing.
Bond lifting can be caused by a multitude of factors, ranging from
contamination of the bond pads to improper wirebonding equipment set-up.
Below is an archived forum thread discussing the common causes of lifted
ball bonds.
Posted by Happy: Mon
Mar 19, 2007 9:01 pm Post
subject: Lifted Ball at Pad |
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Hi! Is there anybody who can
advise me what are the causes of the lifted ball at Pad.
We have received some units from our customer and FA
result after SEM shows that there is not enough adhesion
of the AU ball and the metallization. EDX shows no
anomaly. Machine parameters used during the lot
processing are okay. Thanks for any advise who can give
me. |
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Posted by Spider-boy
300: Tue May 22, 2007 12:07 pm
Post subject: |
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There are many causes of Lifted
Bond on Pad.
When its material related this type of occurence may be
attributed to the quality of the bond pad's surface.
Some pads may be inherently contaminated during
fabrication, and some may have accumulated Si dust
during wafer saw, and was not completely cleaned during
its washing process, but since EDX shows no problem
material issue is definitely out of the question.
LBOP can also be caused improper set-up. Machine factors
such as improper USG calibration,wrong Heater block
temperature,wrong bonding tool used are some of the
factors which can cause LBOP. Correct parameter setting
must also be ensured during set-up. You can also try to
check the process history, machine log and system log
for any errors and downtime encountered during the time
of the processing.
I know that my reply was quite off timing for I just
registered recently, but I hope these may help you in
the future. |
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Posted by Paulpang:
Thu Jun 07, 2007 9:34 pm
Post subject: Re: Lifted Ball at Pad |
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Is there any TODD before
destructive analysis ? |
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Posted by wbshall: Sat
Aug 25, 2007 11:07 am Post
subject: added querry regarding NSOP from Happy |
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Would like to add querry besides
"Happy" concern Regarding NSOP.
I've sent some samples for EDX and found element of
Fluorine, would this element cause a lifted ball on pad.
Also would to like to ask if there are some presence of
contaminants on pad, would it be able to quantify the
amount of contaminants to say cannot bond or can bond.
Plasma cleaning though wouldn't help much as per
observation.
Thanks!
WbShall |
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