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EDX Dead Time and Input Rate
EDX analysis is
one failure analysis technique that takes time and experience to master.
Used for identifying the elemental composition of a sample, EDX analysis
is performed on a SEM that is equipped with an EDX system. An EDX system
operates by counting X-ray emissions from a sample according to their
energy content. The X-ray counts are plotted in histogram format
(with the energy levels on the x-axis), forming an EDX spectrum. The EDX
specturm formed contains peaks that correspond to the elements present
in the sample.
One challenge
in operating an EDX system is ensuring that enough X-ray emissions are
counted and plotted to come up with a valid EDX spectrum. "Dead
time", or the period wherein no emission counts are made, must not be
excessive. Excessive dead time means that not enough counts are
being registered, causing an EDX spectrum with no peaks. The "standard"
for the correct 'dead time' versus count rate varies from one EDX system
to another, so it is important for a failure analyst to be familiar with
his or her system and its calibration standards. The archived forum
thread below reflects the challenges in using an EDX system, as well as
the differences among various EDX systems used in the industry.
Posted by Longier: Sat
Aug 19, 2006 12:31 pm Post
subject: EDX question about deadtime and input rate? |
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Using the Oxford/Hitachi and Horriba/Hitachi
EDX system, I have the following questions:
1. The relation between the input rate and deadtime? The
Horriba service engineer tells me that we should ensure
the input rate no less than 5kcps and the deadtime to be
about 30% when performing the microanaylsis , however,
Oxford engineer give some advice that should promise the
the input rate to be approximately 3 kcps and the
deadtime maybe less than 10% in this case. in fact, the
Horriba system and Oxford
system have the same hardware and software.
2. Generally, I use 20KV acceleration voltage to do EDS,
to get the most reliable EDS results, how to balance the
input ratemeter and deadtime? |
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Posted by FARel Engr:
Mon Aug 21, 2006 6:17 pm
Post subject: |
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It's really a balancing act to
avoid getting too many xray counts (which may indicate
that some 'invalid' xrays are being counted and can
cause spectrum distortion) or getting too little of them
(which can result in an erroneous spectrum if the
'right' xrays are not being counted). To get the dead
time that we want, we try to optimize the probe current
and the spot size, assuming that everything in the
hardware is perfectly aligned and working. |
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Posted by Longier: Mon
Aug 21, 2006 10:59 pm Post
subject: |
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Very thanks for your reply. Would you tell me how to
optimize the probe current and the spot size to get the
satisfied deadtime? do you have some experience or
standards sharing with me? |
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Posted by FARel Engr:
Tue Aug 22, 2006 11:17 am
Post subject: |
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Sorry, but no standards for these
inputs can be defined since xray emission and counting
vary from one specimen to another. That's the reason why
the standardization was defined in terms of the output,
i.e., dead time and counts per sec. Good luck! |
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Posted by Cvill: Thu
Feb 01, 2007 2:15 pm Post
subject: |
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How different is the Horriba,
Oxford and Kevex?
For Kevex, deadtime and cps can be adjusted using the
fast discriminators in the pulse processor setup.
However, it doesn't help me much because if I go for 1
to 2kcps, the deadtime shoots up to 100% and sometimes
give an "No x-ray detected" message.
What am I doing wrong? Does it have to do that I'm
trying a 5kV analysis? We're doing some sulfur
contamination evaluation and this was required by our
customer. Is there a better way to determine sulfur? |
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Posted by FARel Engr:
Fri Feb 02, 2007 7:33 pm
Post subject: |
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Try to get a set-up that achieves about 30% dead time
only. If you've done everything and still can't get any
x-ray counts, then 5 kV may indeed be too low for what
you are trying to detect.
What is the lowest K-alpha peak of sulfur - do you
remember? If I recall it right, it's somewhere around
2.3 kV right? If so, then 5 kV should be enough to
detect it if it's present.
What is the specimen you're trying to analyze? If it's a
bond pad, then 5 kV should have no problems detecting
Al, so Al should at least register in the spectrum. If
Al can't be detected at 5 kV, then there's something
wrong.
I suggest that you check your EDX with a cal standard,
just to make sure that the hardware is really OK. |
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Posted by Longier: Thu
Mar 27, 2008 6:26 pm Post
subject: |
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Now I use the Germany Bruker-AXS
company's SDD XFlash Detector 4010 (No Liquid Nitrogen
EDS system), this EDS can reach energy resolution 125eV
(less than 133 eV), however, the conventional LN2 EDS
can just reach 133 or 137eV and the 125eV can be
specified at 100,000 cps.
The deadtime is less than 10% when the input rate
arrived 10,000cps, the performing time is also 10 times
faster than LN2 EDS system.
No need for anybody to add LN2 or maintenance is the most
improtant and convenient. |
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