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Removing Contaminants from the Die Surface
The
occurrence of contamination on the surface of the die can result in a
multitude of manufacturing and reliability problems, examples of which
include wirebonding failures, metal corrosion, and die surface
delamination. It is therefore absolutely necessary to keep the die
surface free of all forms of contaminants during the wafer fab and
assembly processes. The archived forum thread below discusses some
ways of cleaning the die surface.
Posted by Kramski: Sat
Sep 16, 2006 5:57 am Post
subject: frontside contaminants |
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I'm currently handling backside
operations (Wirebond, saw, E-test).
What are the common practices when cleaning the
frontside of the dice?
My problem is that when we see some particles, we try to
remove it by scrapping them with the vacuum wand tip. I
suspect that we are contributing more particles (from
the rubber) than actually removing the dirt. |
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Posted by Jarod: Sat
Sep 16, 2006 7:33 am Post
subject: |
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Have you determined what are
these contaminants? (i.e. silicon dust).
If its silicon dust, you can check your sawing process
esp during washing. |
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Posted by Techsurfer:
Sun Sep 17, 2006 1:12 am
Post subject: |
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I agree with Jarod. It would be
good to identify the contam. If the contam is just
ordinary dust particles, then maybe it's better to
address the particle count in the cleanroom than pick
the contam from the die. |
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Posted by Jefriz: Mon
Sep 25, 2006 12:43 pm Post
subject: |
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Hi Kramski,
I agree with Jarod & Techsurfer, to identify the
rootcause of the contaminant. Try the several problem
solving techniques in this site.
For containment action, you may try using liquid
cleaning. If you see the contaminant while the dice are
still in wafer frame, you might as well process again in
the wafer cleaning area after wafer saw. You might need
to use surfactant for better results. If already mounted
on leadframe / substrate, try the flux washing process
but use only DI water. You can also try using the
Ultrasonic cleaner (DI water). If the particle is
somewhat microscopic and affects the wirebondability,
try plasma cleaning. Or maybe, you might just need to
use dry air, evaluate the correct pressure.
But you need all to evaluate carefully and observe the
packaging integrity deliverables (WPT, BST, DPT and
others). Cleaning might be one problem but after
cleaning could induced more problem.
Best regards, Jefriz |
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