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Chip Metallization
Although
most wafer fabrication processes use aluminum as the main metal
ingredient in their circuit metallization, they do differ in the dopant
metals that they add to aluminum to achieve certain properties that they
want for their chips. Below is a thread discussing some common
aluminum-based metallization systems.
Posted by Mike: Fri
Jun 10, 2005 3:22 pm Post
subject: Chip Metallization |
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Anybody know about metallization
of wire bond pad like Al/Ti ? |
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Posted by Chip: Sun
Jun 12, 2005 2:42 pm Post
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Other kinds of die metallization:
- pure Al
- Al / 4%Cu
- Al / 2%Si
- Al / 4% Cu / 2% Si
- Al / 1.2% Si / .15% Ti
- Al / 0.1-0.5% Ti
- etc., etc.
In other words, there are many possible alternatives. |
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Posted by Mike: Mon
Jun 13, 2005 4:56 pm Post
subject: |
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Thanks. Could you tell me typical
thickness of metallization? |
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Posted by Guest: Fri
Jun 17, 2005 1:46 pm Post
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how about aluminum fluoride?
anyone here heard of that or had encountered that
problem??? and what are some metallizations that are
most can be seen visually by inspection? |
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Posted by Guest: Tue
Jul 05, 2005 4:36 pm Post
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Hi Mike:
Metallizations ? You meaning the typical IMC thickness ?
Normally, It's base on gold ball shear or will pull to
judge the wire bonding quality and the both of test
values and defect mode is very important for this.
You can using cutter to cross-section and then to do SEM
for inspection IMC layer and EDS(EDX) to measure it if
you interest.
The Poor IMC also will cous hi resistance during F/T.
For your reference. |
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Posted by Guest: Tue
Jul 08, 2005 1:14 pm Post
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No, I think he means the thickness of the metal layers
themselves.
Metal thicknesses used by chips vary, ranging from a few
hundred angstroms to a few thousand angstroms. |
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