Silicon on Insulators, or
the technology wherein different parts of the device circuit are built
on small, separate islands of silicon that are
in effect providing a certain degree of isolation between circuits on
different islands. The necessary interconnections between these isolated
circuits are then achieved
using conventional wafer fabrication techniques. The employment of SOI improves the device's electrical performance
by reducing parasitic capacitances, especially in high-speed and very
dense circuits. It also increases radiation
hardness for aerospace applications.
SOI technology is not new,
studies of which go back to as early as the 1960's. There are
several techniques by which SOI implementation may be achieved, but much
of the earlier work involves
Silicon-on-Sapphire (SOS). Aside from
SOS, techniques for growing single-crystal silicon on various
insulating substrates have also been explored and achieved, although
most of these processes never became widely used in
One current SOI technology,
however, has resulted in MOS and bipolar devices with excellent
properties. This involves the use of
oxide layers, which are basically subsurface layers of silicon dioxide
through ion implantation of very high doses of oxygen.
involves the epitaxial growing of silicon on a substrate of
This growth is termed
since the material of the grown layer is different from that of the
substrate. Nonetheless, the equipment and materials used for the
heteroepitaxial growth of SOS are essentially identical to those used in
is commonly used as the source of silicon for SOS growth. Its
reaction in a carrier hydrogen gas, SiH4 --> Si + 2H2,
results in the deposition of a silicon layer over the sapphire
substrate. The deposition temperature is usually kept below 1050
deg C in order to prevent the
from the sapphire substrate to the silicon layer. The desired
silicon orientation is <100>, which has been achieved on various
sapphire orientations, i.e., <1102>, <0112>, <1012>.
As in any
technology, SOS has some inherent
that need to be addressed before its benefits can be realized.
Because of the lattice parameter mismatch between the grown silicon
layer and the sapphire substrate, misfit dislocations, edge
dislocations, and stacking faults are frequently encountered in SOS
devices, with the
distance from the substrate.
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difference between the coefficients of thermal expansion of silicon and
sapphire also results in a residual
silicon layer, which tends to reduce hole mobility. This, coupled
with the lower hole and electron mobilities caused by defects,
ultimately results in SOS wafers yielding MOS devices with poorer
performance in comparison to those fabricated on bulk silicon.
basic steps: 1) O2 is
the silicon substrate
at a high dosage (approx. 2e18 cm-2) and energy (150-300 keV);
process at a high temperature (1100-1175 deg C) is done in an inert
environment (e.g., using N2) for 3-5
hours, achieving two things: restoration of the crystallinity of the
substrate surface and formation of the buried oxide itself; and 3) a
silicon (which will subsequently serve as the layer over which the
circuits will be built) is deposited over the buried oxide.
Recently, buried silicon nitride layers (Si3N4)
have likewise been successfully used in SOI technology.
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